Thin film deposition

Thin film deposition

evaporation (resistance-heated, electron-beam)
sputtering (dc-, rf-magnetron, ion-beam)
plasma enhanced chemical vapour deposition (PECVD)

Materials: NiCr, C, Pt, Ti, Au, Nb  

mikro_duennfilm.gif Superconducting components

For superconducting components a robust Nb/Al –AlOx/Nb technology was developed. The technology allows the complex composition of 9-11 layered systems consisting of different metal, metal oxide and silicon oxide depositions.
Thereby you can create minuscule sensor chips such as Superconducting Quantum Interference Device.

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Supracon AG
An der Lehmgrube 11
07751 Jena

Tel.: +49-3641-2328100
Fax.: +49-3641-2328109