Spin coating processing, exposure in contact and proximity mode
(mask aligner)
exposure in projection mode (automatic repeater)
e-beam exposure  

mikro_litho.gif Focal plane filter mosaics for optical application

To fabricate mosaic filters with spectral characteristics it is required to arrange the different spectral areas laterally with an accuracy of a few pixels. Similarly all of the adjacent subfilters must be arranged without any gap, requiring a micrometer (µm) accuracy of the lateral edges.

This can only be realised by a sophisticated lithography which was developed by Supracon.

« back

Contact us

Supracon AG
An der Lehmgrube 11
07751 Jena

Tel.: +49-3641-2328100
Fax.: +49-3641-2328109