dry etching (reactive ion beam, reactive ion)
, metal, oxides.
Applications: planar waveguides.
Planar waveguides in cooperation with IPHT Jena (Institute of Photonic Technology)
Planar waveguides allow an easy and precise guidance of optical fibers within integrated optical components. In a joint project with the IPHT
special etching technologies were developed for the fabrication of such waveguides with the highest accuracy. This technology is able to produce very high aspect ratios excellent surface roughness of the structure edges and thereby a high quality of the component.